P.
J.
Koppinen
Koppinen, P. J., Stewart, M. D., & Zimmerman, N. M. (2013). Fabrication and Electrical Characterization of Fully CMOS-Compatible Si Single-Electron Devices. Ieee Transactions on Electron Devices, 60, 78–83. http://doi.org/10.1109/ted.2012.2227322