F.
Yesilkoy
Yesilkoy, F. ., Ropp, C. ., Cummins, Z. ., Probst, R. ., Waks, E. ., Shapiro, B. ., & Peckerar, M. . (2014). New applications and emerging technologies in nanolithography. In Nanolithography (pp. 538–550). Elsevier. http://doi.org/10.1533/9780857098757.538