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Foroozani, N., Hobbs, C., Hung, C. C., Olson, S., Ashworth, D., Holland, E., … Osborn, K. D. (2019). Development of transmon qubits solely from optical lithography on 300 mm wafers. Quantum Science and Technology, 4. http://doi.org/10.1088/2058-9565/ab0ca8