B.
Baker-O
Neal
Rao, S. S. P., Hobbs, C. ., Olson, S. ., Foroozani, N. ., Chong, H. ., Stamper, H. ., … Liehr, M. . (2018). Materials And Processes For Superconducting Qubits And Superconducting Electronic Circuits On 300mm Wafers. In ECS Transactions (Vol. 85, pp. 151–161). http://doi.org/10.1149/08506.0151ecst
Foroozani, N. ., Hobbs, C. ., Hung, C. C., Olson, S. ., Ashworth, D. ., Holland, E. ., … Osborn, K. D. (2019). Development of transmon qubits solely from optical lithography on 300 mm wafers. Quantum Science and Technology, 4. http://doi.org/10.1088/2058-9565/ab0ca8