Publication Details
Publication Type
Journal Article
Year of Publication
2003
Volume
21
Number of Pages
2907
ISSN Number
0734211X
DOI
10.1116/1.1627815
URL
http://scitation.aip.org/content/avs/journal/jvstb/21/6/10.1116/1.1627815
Journal
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Contributors