Publication Details Author D. Tennant R. Colombelli K. Srinivasan M. Troccoli O. Painter C. Gmachl F. Capasso A. Sergent D. Sivco A Cho Publication Type Journal Article Year of Publication 2003 Volume 21 Number of Pages 2907 ISSN Number 0734211X DOI 10.1116/1.1627815 URL http://scitation.aip.org/content/avs/journal/jvstb/21/6/10.1116/1.1627815 Journal Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures DOIGoogle Scholar Contributors Groups Srinivasan Research Group