Abstract

Heterogeneous integration through low-temperature die bonding is a promising technique to enable high-performance III-V photodetectors on the silicon nitride (Si3N4) photonic platform. Here we demonstrate InGaAs/InP modified uni-traveling carrier photodiodes on Si3N4 waveguides with 20 nA dark current, 20 GHz bandwidth, and record-high external (internal) responsivities of 0.8 A/W (0.94 A/W) and 0.33 A/W (0.83 A/W) at 1550 nm and 1064 nm, respectively. Open eye diagrams at 40 Gbit/s are demonstrated. Balanced photodiodes of this type reach 10 GHz bandwidth with over 40 dB common mode rejection ratio.

Publication Details
Publication Type
Journal Article
Year of Publication
2020
Volume
28
Number of Pages
14824-14830
DOI
10.1364/OE.387939
URL
http://www.opticsexpress.org/abstract.cfm?URI=oe-28-10-14824
Journal
Opt. Express
Contributors
Date Published
May