Kang-mook Lim

Lim, K.- mook ., Gupta, S. ., Ropp, C. ., & Waks, E. . (2011). Development of metal etch mask by single layer lift-off for silicon nitride photonic crystals. Microelectronic Engineering, 88(6), 994–998. http://doi.org/10.1016/j.mee.2010.12.113 (Original work published June 2011)