Publication Details Author Kang-mook Lim Shilpi Gupta Chad Ropp Edo Waks Publication Type Journal Article Year of Publication 2011 Volume 88 Issue 6 Number of Pages 994-998 ISSN Number 0167-9317 DOI 10.1016/j.mee.2010.12.113 Journal Microelectronic Engineering DOIGoogle Scholar Contributors Groups JQI Waks Research Group Date Published 06/2011