Marshall
Schroeder
Kozen, A. ., Schroeder, M. ., Osborn, K. D., Lobb, C. J., & Rubloff, G. . (2013). Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric. Applied Physics Letters, 102, 173501. http://doi.org/10.1063/1.4801979 (Original work published April 2013)