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Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric

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Publication Details
Author
Alexander Kozen
Marshall Schroeder
Kevin Osborn
C. Lobb
Gary Rubloff
Publication Type
Journal Article
Year of Publication
2013
Volume
102
Number of Pages
173501
ISSN Number
1077-3118
DOI
10.1063/1.4801979
URL
http://dx.doi.org/10.1063/1.4801979
Journal
Applied Physics Letters
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Contributors
Groups
JQI
Lobb Research Group
Osborn Research Group
Date Published
04/2013