Abstract
We consider the impact of precursor gas ratio on nominally stoichiometric silicon nitride films, and show how it has a significant impact on microresonator integrated dispersion and broadband comb generation in the near-visible.
Year of Publication
2021
Conference Name
2021 Conference on Lasers and Electro-Optics
Date Published
05/2021
URL
https://ieeexplore.ieee.org/abstract/document/9572394
Group