Abstract

We report the development of an ultrasensitive optomechanical sensor designed to improve the accuracy and precision of force measurements with atomic force microscopy. The sensors reach quality factors of 4.3 x 10(6) and force resolution on the femtonewton scale at room temperature. Self-calibration of the sensor is accomplished using radiation pressure to create a reference force. Self-calibration enables in situ calibration of the sensor in extreme environments, such as cryogenic ultra-high vacuum. The senor technology presents a viable route to force measurements at the atomic scale with uncertainties below the percent level. (C) 2014 AIP Publishing LLC.

Publication Details
Publication Type
Journal Article
Year of Publication
2014
Volume
105
DOI
10.1063/1.4903801
Journal
Applied Physics Letters
Contributors
Groups